Automated Analysis for Ultrapure Semiconductor Grade Chemicals
Eliminate manual handling of samples to deliver the lowest possible detection limits with increased operator safety.
Boost Precision, Safety, and Consistency in Semiconductor Trace Analysis Workflows
Automated prepFAST systems deliver precise, syringe-driven handling of ultrapure semiconductor chemicals to ensure the highest levels of purity and reproducibility in trace analysis. By automating every step of sample and reagent delivery, these systems eliminate manual variability, reduce the risk of cross-contamination, and maintain chemical integrity at every stage. The result is reliable achievement of PPT to PPQ detection limits.
System Capabilities
| SGTX | prepFAST S | prepFAST SE | prepFAST PPQ | prepFAST CARBON | |
|---|---|---|---|---|---|
| Exhausted Enclosure | ✓ | ✓ | ✓ | ✓ | ✓ |
| Syringe-driven Injection | ✓ | ✓ | ✓ | ✓ | ✓ |
| PPT Metals | ✓ | ✓ | ✓ | ✓ | ✓ |
| Inline Std Cal | ✓ | ✓ | ✓ | ✓ | ✓ |
| Inline Sample Dilution | ✓ | ✓ | ✓ | ✓ | |
| Matrix Matching | ✓ | ✓ | ✓ | ✓ | |
| Automatic Bottle Uncapping | ✓ | ||||
| Barcode Tracking | ✓ | ||||
| Nanoparticle Analysis | ✓ | ||||
| PPQ Metals | Optional | ✓ | |||
| Organics | Optional | ✓ | |||
| Anions/Cations | Optional |
SGTX
Automated PPT/PPQ Metals and Nanoparticle Analysis in Semiconductor Chemicals
SGTX automatically vortex mixes, uncaps sample vessels, and scans barcodes prior to analysis. Together with autocalibration and autodilution, this fully automated system preserves sample integrity, reduces contamination & evaporation, increases traceability, and enables sub-ppt metals and nanoparticle detection in semiconductor chemical analysis.
Automated Uncapping, Vortex Mixing & Barcode Reading
- Automatic Bottle Uncapping – Safeguard sample integrity and improve lab safety
- Nanoparticle analysis – Homogenize samples through automated vortex mixing
- Multi-instrument sample tracking – Track samples across multiple instruments (ICPMS, GC-MS, QTOF-MS, IC-MS)
- Ultrapure Semiconductor Chemical Analysis – Autocalibration and autodilution for sub-ppt metals and nanoparticle detection
- Direct analysis of concentrated chemicals without pre-dilution
- Flexible & Scalable – Compatible with trace metals, non-polar/volatile organics, nanoparticles, and ionic species
prepFAST S
Automated Introduction of Pure Semiconductor Chemicals
The prepFAST S has revolutionized the way ultrapure semiconductor grade chemicals are analyzed with ICPMS detection. The prepFAST S utilizes syringe-driven flows of UPW, semiconductor grade acids, and standard solution to automate both sample dilutions and standard curve generation. It eliminates manual handling of samples and standards to deliver sub-ppt detection limit capabilities.
High Purity Automation with PPT/PPQ Results
- Automated Inline Sample Dilution – Eliminates manual dilution, reducing contamination and improving reproducibility
- Efficient Syringe-Driven Injection – Provides consistent flow rates and rapid switching between chemicals for accurate analysis
- Fully Enclosed Environment – Maintains clean conditions, ensuring contamination-free analyses without the need for a clean room
- Sub-PPT Detection Limits – Capable of detecting trace elements at extremely low concentrations suitable for semiconductor applications
- Fluoronetic Autosampler – Reduces contamination risks with all fluoropolymer components and accommodates a wide range of bottle sizes
prepFAST SE
Benchtop System for Ultrapure Chemicals
The prepFAST SE has revolutionized the way ultrapure semiconductor grade chemicals are analyzed with ICPMS detection. The prepFAST SE utilizes syringe-driven flows of UPW, semiconductor grade acids, and standard solution to automate standard curve generation. It is an economical option for eliminating manual handling of samples to deliver sub-ppt detection limit capabilities.
High Purity Automation with PPT/PPQ Results
- Syringe-Driven Sample Injection – Ensures consistent flow rates for accurate sample introduction
- Automated Calibration Preparation – Minimizes contamination risks by automatically preparing standards
- Fluoronetic Autosampler – Reduces contamination with all fluoropolymer components, accommodating various bottle sizes
- Clean-Room Environment – Operates without a physical clean room while removing hazardous fumes
- Sub-Ppt Detection Limits – Ideal for ultra-sensitive applications in semiconductor-grade chemical analysis
prepFAST PPQ
Automated PPQ Metals Determination
The prepFAST PPQ utilizes syringe-driven flows of UPW, semiconductor grade acids, and standard solution to automate both sample dilutions and standard curve generation. It eliminates manual handling of samples to deliver sub-ppt detection limit capabilities in direct analysis mode and sub-ppq detection limit capabilities in concentration mode.
- Syringe-Driven Automation – Automates sample dilutions and standard curves for various ultrapure chemicals
- Sub-PPT and Sub-PPQ Detection – Achieves exceptional sensitivity for metal detection
- Integrated Ultraclean Environment – Maintains clean conditions to minimize contamination
- Automated Inline Calibration – Adapts to viscosities for enhanced operational efficiency
- Wide Compatibility – Handles various semiconductor-grade chemicals, eliminating matrix issues
- Continuous High Purity Rinsing – Ensures sample integrity with a high-purity rinse system
prepFAST CARBON
Determination of Organic Contaminants
The prepFAST CARBON has revolutionized the way ultrapure semiconductor grade chemicals are analyzed for organic contamination with TOF-MS/QTOF-MS detection. The prepFAST CARBON utilizes syringe-driven flows of UPW, semiconductor chemicals, and multiple standard solutions to automate both sample dilutions and standard curve generation. It eliminates manual handling of samples to deliver ppb/ppt detection limit capabilities.
- Syringe-Driven Automation – Automates sample dilution and standard curve generation, enhancing efficiency
- TOF-MS/QTOF-MS Compatibility – Supports high-resolution mass spectrometry for organic contaminant analysis
- Comprehensive Organic Contaminant Analysis – Quantifies targeted and semi-quantifies non-targeted organic contaminants in various chemicals
- Flexible Data Reporting Options – Offers customizable data outputs for different applications
- Integrated Software – Features user-friendly software with built-in dynamic library options
