The prepFAST S5 has revolutionized the way ultrapure semiconductor grade chemicals are analyzed with ICPMS detection. The prepFAST S5 utilizes syringe-driven flows of UPW, semiconductor grade acids, and standard solution to automate both sample dilutions and standard curve generation. It eliminates manual handling of samples to deliver sub-ppt detection limit capabilities.
The prepFAST S5 automatically prepares calibration curves for over 40 elements controlled in semiconductor manufacturing processes. Calibrations are generated by automatically diluting an enclosed multielement stock standard. Automation with the high-purity prepFAST S5 achieves low to sub-ppt calibrations.
The prepFAST S5 allows dilution by volume or weight for all semiconductor-grade chemicals. Metals are quantified using automated inline MSA or external calibration. Automated direct analysis of concentrated chemicals eliminates sample contamination caused by manual dilution into a secondary container.
prepFAST S5 System