prepFAST S5
Automated Introduction of Pure Semiconductor Chemicals for ICPMS Analysis

The prepFAST S5 has revolutionized the way ultrapure semiconductor grade chemicals are analyzed with ICPMS detection. The prepFAST S5 utilizes syringe-driven flows of UPW, semiconductor grade acids, and standard solution to automate both sample dilutions and standard curve generation. It eliminates manual handling of samples to deliver sub-ppt detection limit capabilities.

prepFAST S5 Autocalibration

The prepFAST S5 automatically prepares calibration curves for over 40 elements controlled in semiconductor manufacturing processes. Calibrations are generated by automatically diluting an enclosed multielement stock standard. Automation with the high-purity prepFAST S5 achieves low to sub-ppt calibrations.


High Purity Automation with Sub-PPT results

Automation

  • Automatic external and MSA calibrations
  • Automated sample sensing
    - accounts for viscosity and automatically adjusts timing
    - detects and injects the sample and triggers the ICPMS
  • Automated syringe-driven sample introduction
    - Sample loading
    - Sample preparation
    - Inline dilution
    - Acid addition

Ultraclean

  • Ultraclean sample preparation
  • Integrated ultraclean sample environment
  • Includes ultraclean air shower (Options include):
    - ULPA (Ultrapure air) filter
    - Sample racks for PFA containers (<1 mL to 500 mL)
  • Continuously-flowing high purity UPW rinse (user-supplied UPW)
  • UPW polishing columns for low background

PPT/Sub-PPT Results

  • Capability to analyze all semiconductor grade chemicals
  • PPT/PPQ detection limits for all semiconductor elements

prepFAST S5 Inline Dilution of Semiconductor-grade Chemicals

The prepFAST S5 allows dilution by volume or weight for all semiconductor-grade chemicals. Metals are quantified using automated inline MSA or external calibration. Automated direct analysis of concentrated chemicals eliminates sample contamination caused by manual dilution into a secondary container.

prepFAST S5 Autocalibration

prepFAST S5 System Schematic


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