prepFAST S
Automated Introduction of Pure Semiconductor Chemicals for ICPMS Analysis

Pure Automation  |  Pure Simplicity  |  Pure Performance  |  prepFAST Comparison Chart

Simplify your testing without sacrificing detection limits.

  • Fluoropolymer wetted parts
  • Can meet or exceed ICPMS specifications for BEC and LOD
  • Reagent cleaning polishing columns for low background

BEC and LOD using prepFAST
Element BEC (ppt) LOD (ppt) Element BEC (ppt) LOD (ppt)
7Li .02 .02 56Fe 0.8 0.5
23Na 0.3 0.2 59Co 0.08 0.06
24Mg 0.1 0.1 60Ni 0.5 0.4
27Al 0.3 0.2 63Cu 0.4 0.08
39K 1 0.6 64Zn 0.5 0.4
40Ca 0.3 0.2 107Ag 0.3 0.4
52Cr 0.2 0.4 208Pb 0.02 0.03

Direct Analysis of Semiconductor Chemicals:

  • 98% H2SO4
  • 89% H3PO4
  • 70% HNO3
  • 49% HF
  • 31% Ammonium Hydroxide
  • TMAH (25%/2.38%)
  • IPA
  • PGMEA
  • DIW
  • Others

Direct Analysis of 49% HF with 5x Inline Dilution
Element prepFAST S
Found (ppt)
Certified
(ppt)
Element prepFAST S
Found (ppt)
Certified
(ppt)
7Li .05 <.01 56Fe 2.6 <5.0
23Na 0.48 <5.0 59Co 0.9 <0.5
24Mg 0.47 <0.5 60Ni 0.6 <5.0
27Al 3.2 <5.0 63Cu 0.5 <5.0
39K 1.2 <5.0 64Zn 0.4 <1.0
40Ca 1.9 <5.0 107Ag 0.01 <0.5
52Cr 0.6 <5.0 208Pb 0.02 <0.1

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Ca Autocalibration in DIW

Ca Autocalibration in DIW

Na Autocalibration in 5x Inline Diluted HF

Na Autocalibration in 5x Inline Diluted HF

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